Plasma apparatus for thin film formation
Description
universal system for deposition of thin films by magnetron sputtering supplemented by plasma polymerization capabilities
Technical Details
Výrobce / Hersteller
UJEP
TRANS³Net-Portal for transnational innovation and transfer
MATun: Svět materiálů – Univerzity spolu / Materialwissen – Unis gemeinsam
universal system for deposition of thin films by magnetron sputtering supplemented by plasma polymerization capabilities