Resolution: sample-dependent, approx. 10 nm at 20 kV, useful magnification: 20,000x - 30,000x, Standard SE detector and 3d BSE detector (Point-electronic) with MeX software (Alicona), 3d reconstructions of the surface, roughness measurements, pixel resolutions of the images freely selectable via external image acquisition and beam control system DISS from Point-electronic, Noran system 7 -EDX system with SDD detector