Responsible lecturer doc. Ing. Martin Kormunda, Ph.D.
Lecturers: doc. Ing. Martin Kormunda, Ph.D., doc. RNDr. Stanislav Daniš, Ph.D.
Semester: Winter Semester, Compulsory elective course with 2 credits
Online-Lecture: Mondays 11.11. – 16.12.24, 15.00 -16.30
Practical courses: 27.1. and 28.1.25
Capacity: 4 students
Condition: practical courses are compulsory
Registration via Opal: Plasma Methods for Nanolayers and X-ray Analytics – OPAL (sachsen.de)
The first part of the lectures is aimed at getting to know the physics of plasma so that it is possible to apply this knowledge to the issues of use in material engineering and analytical methods. The second part is focused on X-ray methods suitable for the analysis of layers and surfaces, diffraction methods and photoelectron spectroscopy.
Content:
In the lectures, interesting plasma discharges (environments) from low pressure to atmospheric, including typical problems and applications, are discussed. In other words, plasma generation methods using direct, alternating and pulsed voltages and currents.
Special emphasis is placed on the interaction of charged particles with surfaces under conditions typical of the mentioned discharges (plasma chemistry, particle deposition, sputtering, implantation, etc.).
Teaching analytical methods for thin layers and surfaces will focus on mastering the basic principles of X-ray diffraction and photoelectron spectroscopy.
Part of the lecture will also be an introduction to the relevant experimental equipment and an introduction to the physics and technology of low pressures.
Photoelectron spectroscopy will be demonstrated as a method of qualitative and quantitative surface analysis, including a discussion of principle limitations.
The part of the lecture concerning x-ray diffraction will be devoted to the basic of crystallography and scattering of x-ray on ordered atoms. Elementary evaluation of scattering data – determination of lattice parameters, qualitative analysis of the sample composition, resolving the thickness of thin film – from laboratory diffractometers will be shown.
Practical teaching
Practical teaching will take place in blocks divided into:
- Plasma technology
- X-ray diffraction
- X-ray photoelectron spectroscopy
Date of event
| Date | Realization | Content | Lecturers |
| 11.11. 15 – 16:30 | online | Low Pressure Plasma Processes and Applications – Part 1 | doc. Kormunda |
| 18.11. 15 – 16:30 | online | Low Pressure Plasma Processes and Applications – Part 2 | doc. Kormunda |
| 25.11. 15 – 16:30 | online | Low Pressure Plasma Processes and Applications – Part 3 | doc. Kormunda |
| 2.12. 15 – 16:30 | online | Low Pressure Plasma Processes and Applications – Part 4 | doc. Kormunda |
| 9.12. 15 – 16:30 | online | Low Pressure Plasma Processes and Applications – Part 4 | doc. Kormunda |
| 16.12. 15 – 16:30 | online | X-ray photoelectron spectroscopy for material science | doc. Kormunda |
| 27.1. 9 – 16:30 | practise | Low Pressure Plasma Processes and Applications – practise | doc. Kormunda |
| 28.1. 9 – 10:30 | live | X-ray diffraction for material science – lecture | doc. Daniš |
| 28.1. 11 – 12:30 | practise | X-ray diffraction for material science | doc. Daniš |
| 28.1. 14 – 15:30 | practise | X-ray photoelectron spectroscopy for material science | doc. Kormunda |