High-resolution low-voltage scanning electron microscope with field emission cathode Zeiss DSM 982 Gemini: resolution depends on sample, useful magnification: 100,000 - 200,000x, equipped with SE, SE-Inlens and BSE detector (Robinson detector), pixel resolutions of the images freely selectable by external image acquisition and beam control system DISS from Point-electronic, Noran-Voyager-3000-EDX system with Si(Li) detector